Abstract: This paper is the result of maintenance the instrument.Objective The Inductively coupled plasma source (ICP) in the multi-collector Inductively coupled Plasma Mass Spectrometer(MC-ICP-MS) is a kind of high temperature ionization source under atmospheric pressure, which is produced by the interaction of several sophisticated components and is an important component of MC-ICP-MS, The Plasma Generation Process of the Mass Spectrometer is mainly performed by the ICP. It is necessary to strengthen its routine maintenance and failure analysis. MethodsTaking the MC-ICP-MS(NEPTUNE) of Thermo Fisher Scientific as an example, This type of mass spectrometer mainly has plasma source fault, electronic fault, vacuum fault, gas support fault, circulating water support fault, etc. among which plasma source ignition fault is particularly common, and the influencing factors are complex. Results On the basis of a detailed introduction to the working principle of ICP and the maintenance experience of each of its components, the fault phenomena and treatment methods in the ignition process of this instrument are summarized in detail.ConclusionsPay attention to the routine maintenance and failure analysis of the plasma source can greatly improve the utilization of Neptune and ensure the acquisition of high-quality measurement data.It provide reference for the use and maintenance of the instrument.