Quartz Mineral Purification and Application Technology in Strategic Emerging Industries
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摘要:
随着全球科学技术的发展以及高新技术领域应用需求的提升，新兴产业的发展和开发得到了特别地关注，其中石英矿物资源的开发和应用也受到了各国极大的重视。针对石英矿物资源的开发和应用现状和遇到的技术问题，概述了我国石英的类型、储量和消费结构，阐述了石英的杂质类型和石英的提纯与合成技术，详细分析高纯石英在半导体行业、光纤行业、光伏产业、光学领域、航空航天等战略性新兴产业中的应用现状和技术难点，阐明杂质对于这些领域的产品性能的关键影响作用与控制方法。
Abstract:Great attention has been paid to the development and application of emerging industries, due to the rapid development of science and technology and the improved demand in the field of new and high-tech areas, among which the application of quartz minerals has attracted very high level concerns. Based on the situation and problems during the development and application of quartz minerals, this review summarizes the types, reservation data, and the consumption ways of quartz in our country; Then the types of impurities, the purification methods, and synthesis technology of quartz are included; The application status of quartz as well as the technical difficulty in such strategic emerging industries as the semiconductor industry, optical industry, photovoltaic industry, aerospace field are analyzed in detail. Finally, the effects of impurities on performances of different products in these areas and their control methods are clarified.
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表 1 美国尤尼明IOTA系列高纯石英相关指标[27]
/10-6 Table 1. United States Unimin IOTA series high purity quartz related indicators[27]
元素 Al B Ca Cr Cu Fe K Li Mg Mn Na Ni IOTA-Std 16.2 0.08 0.5 < 0.05 < 0.05 0.23 0.60 0.90 < 0.05 < 0.05 0.9 < 0.05 IOTA-4 8.0 0.04 0.6 < 0.05 < 0.05 0.3 0.35 0.15 < 0.05 < 0.05 0.9 < 0.05 IOTA-6 8.0 0.04 0.6 < 0.05 < 0.05 0.15 0.15 0.15 < 0.05 < 0.05 0.08 < 0.05 IOTA-8 7.0 < 0.04 0.5 < 0.02 < 0.02 < 0.03 < 0.04 < 0.02 < 0.02 < 0.02 - < 0.02 
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表 2 常规粉碎和电动力学破碎的0.1~0.3 mm石英样品化学分析结果[24]
/10-6 Table 2. Chemical analysis 0.1~0.3 mm quartz samples were crushed by conventional crushing and electrokinetic crushing[24]
元素 Al Fe Na K Li Ti Zr 石英原料 41 4.9 12 15 0.5 1.3 < 0.1 传统粉碎 23 464 10 3.5 0.6 1.9 < 0.1 电动破碎 28 1.3 13 4.7 0.6 0.5 < 0.1
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分选方法 原理 选出的杂质 特点 磨擦 通过机械力和沙粒之间的磨剥力除去表面的杂质 薄膜铁、泥性杂质矿物 擦碎未成单体的矿物集合体，再经过分级作业 色选 矿物光学特性 深色或浅色的杂质矿物 经济效率高 磁选 矿物磁性 褐铁矿、赤铁矿、黑云母、钛铁矿、磁铁矿 多次磁选、除铁效果好 浮选 矿物表面性质 云母、长石、铁矿石等 反浮选、多次精选
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表 4 0.1~0.3 mm的石英样品经化学处理后化学成分分析[24]
/10-6 Table 4. Chemical analysis Quartz samples after chemical treatment of 0.1-0.3 mm[24]
成分 Al Fe Na K Li Ti Zr 磁选石英 21 0.2 3.1 1.0 2.2 1.2 < 0.1 酸洗 21 < 0.1 2.8 0.9 2.2 1.2 < 0.1 浸出 20 < 0.1 0.7 0.3 2.2 1.2 < 0.1 热氯化 21 < 0.1 0.2 < 0.1 1.6 1.1 < 0.1
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表 5 半导体用透明石英玻璃管、棒杂质含量要求
/10-6 Table 5. Content of impurities in transparent quartz glass tube and rod for semiconductor
13种总杂质含量 Fe Ti Cu B Li、Na、K总含量 半导体用透明石英玻璃管 T级 ≤30.00 ≤1.50 ≤3.00 ≤0.80 ≤0.20 ≤5.00 半导体用透明石英玻璃棒
半导体用透明石英玻璃器件D级 ≤25.00 ≤0.80 ≤2.00 ≤0.50 ≤0.10 ≤2.50 太阳能电池硅片用石英舟
太阳能电池硅片用石英玻璃扩散管T级 ≤30.00 ≤1.50 ≤3.00 ≤0.80 ≤0.20 ≤5.00 单晶硅生长用石英坩埚(太阳能级) T级 ≤20.00 ≤0.50 ≤0.20 ≤2.00 单晶硅生长用石英坩埚(半导体级) B级 ≤17.00 ≤0.30 ≤0.10 ≤2.00 注：13种杂质含量元素为Al、Fe、Ca、Mg、Ti、Cu、Co、Mn、Ni、Li、Na、K、B。
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